This report describes the development of a low cost vibration amplitude sensor. The processes used to develop this sensor involve the use of Micro-Electronic and Mechanical Systems (MEMS) manufacturing techniques. The major mechanical element of the vibration sensor is the cantilever beam which is on the order of 500 m in length. Vibration of the MEMS device in the plane perpendicular to the cantilever beam causes flexing of the beam which produces changes in the resistance of a piezoresistor etched at the base of the beam (spring element). These changes in resistance (and thus voltage) along with a unique signal processing scheme are used to determine the acceleration amplitude of the MEMS device.
Citation: Journal of Research (NIST JRES) -
Volume: 112 No. 2
NIST Pub Series: Journal of Research (NIST JRES)
Pub Type: NIST Pubs
approximate root mean square, cantilever accelerometer, micro electro mechanical system, vibration meter