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Structural, Electronic, and Dielectric Properties of Ultrathin Zirconia Films on Silicon

Published

Author(s)

Safak Sayan, Nhan V. Nguyen, James R. Ehrstein, Tom Emge, Eric Garfunkel, Mark Croft, X Zhao, David V. Vanderbilt, Ira Levin, Evgeni Gusev, Hyunjung G. Kim
Citation
Applied Physics Letters
Volume
86

Citation

Sayan, S. , Nguyen, N. , Ehrstein, J. , Emge, T. , Garfunkel, E. , Croft, M. , Zhao, X. , Vanderbilt, D. , Levin, I. , Gusev, E. and Kim, H. (2005), Structural, Electronic, and Dielectric Properties of Ultrathin Zirconia Films on Silicon, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32146 (Accessed April 18, 2024)
Created November 17, 2005, Updated January 27, 2020