This paper describes an interferometric platform for measuring the full-field deflection of atomic force microscope (AFM) probes and generic cantilevers during quasi-static loading. The platform consists of a scanning white light interferometer (SWLI), holders for the cantilevers, a translation stage, a rotation (tip-tilt) stage, and an adapter plate to connect these items to the SWLI table. Visualization of cantilever bending behavior is demonstrated for snap-in against a rigid surface, cantilever-on-cantilever tests, and a damaged AFM probe. A new approach to normal force calculation using a polynomial fit to the cantilever deflection profile is also presented and verified experimentally. The method requires only the coefficient for the third order (cubic) term from the fit to the deflection profile, the elastic modulus, and the area moment of inertia for the cantilever under test.
Citation: Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Pub Type: Journals
atomic force microscope, cantilever calibratrion, stiffness calibration