We have investigated the shrinkage of solid state nanopores by a scanning electron microscope and find the process to be reproducible and dependant beam parameters such as the accelerating voltage and electron flux. The shrinking phenomenon does not involve simple electron beam induced deposition of hydrocarbon contaminants but is an energy dependant process that involves material flow along the surface of the nanopore membrane. Pores thus fabricated were then used to detect λ DNA.
Citation: Nano Letters
Pub Type: Journals
nanopore, scanning electron microscopy, nanolithography, DNA, single molecule sensing