Vacuum gauges are used to measure pressures below the local atmospheric pressure. The success of many processes relies on an accurate vacuum pressure measurement, making calibration of vacuum gauges essential. This paper discusses the issues related to vacuum gauge calibration, including what to expect from a calibration, calibration uncertainty, and traceability to calibration standards.
Citation: Vacuum Technology and Coating Magazine
Pub Type: Others
calibration, gauges, pressure, uncertainty, vacuum