A 70 micrometer pinhole and an X-ray CCD camera in single photon counting mode were used to obtain spatially and spectral resolved images of an electron cyclotron resonance (ECR) ion source generated plasma. The method has good spatial resolution as well as the capability of post-processed energy filtering of the images. The X-ray images clearly show the spatial positions of different sources of the X-ray photons: bremsstrahlung, characteristic lines of the plasma ions, and X-ray emitted from the wall.
Citation: IEEE Transactions on Plasma Science
Pub Type: Journals
bremsstrahlung, plasma ions, x-ray