Cassard, J.
, Geist, J.
, Gaitan, M.
and Seiler, D.
(2012),
The MEMS 5-in-1 Reference Materials (RM 8096 and 8097), International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910317
(Accessed April 18, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published
Author(s)
, , ,
Abstract
The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary standard test methods. Example NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.Proceedings Title
International Conference on Microelectronic Test Structures (ICMTS)
Conference Dates
March 19-22, 2012
Conference Location
San Diego, CA
Pub Type
Conferences
Download Paper
Keywords
ASTM, cantilevers, fixed-fixed beams, interferometry, length measurements, MEMS, residual strain, residual stress, SEMI, RM, step height measurements, strain gradient, stress gradient, test structures, thickness, vibrometry, Young's modulus measurements
Citation
Created March 21, 2012, Updated February 19, 2017