Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
Proceedings Title: OSA Technical Digest
Conference Dates: June 23-27, 2013
Conference Location: Alexandria, VA
Conference Title: Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
Pub Type: Conferences
Industrial inspection, Three-dimensional image processing, optical metrology