We investigate the validity of using frequency-dependent charge pumping (FD-CP) to determine bulk defect depth distributions. Using simple physical arguments we conclude that: (1) the effective tunneling length to a bulk defect can be very different than its actual physical depth, and (2) only a fraction of detrapping charge may contribute to the CP current (ICP) resulting in analysis errors. Thus, the relationship between frequency and defect depth is much more complex than what has been previously reported.
Proceedings Title: IEEE International Integrated Reliability Workshop Final Report
Conference Dates: October 14-18, 2012
Conference Location: South Lake Tahoe, CA
Conference Title: IEEE International Integrated Reliability Workshop
Pub Type: Conferences