We demonstrate a new charge pumping (CP) methodology, frequency modulated CP (FMCP), that robustly treats metrology challenges associated with high gate leakage current. By moving to an AC coupled measurement, we are able to easily resolve small CP signals despite excessively high gate leakage current backgrounds. We demonstrate the utility of FMCP as a reliability monitoring tool in highly scaled and highly leaky devices.
Proceedings Title: Proceedings of the IEEE International Reliability Physics Symposium
Conference Dates: April 15-18, 2013
Conference Location: Monterey, CA
Conference Title: IEEE International Reliability Physics Symposium
Pub Type: Conferences