In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.
Proceedings Title: More than Moore
Conference Dates: October 7-12, 2012
Conference Location: Honolulu, HI
Conference Title: 222nd Meeting of ECS The Electrochemical Society
Pub Type: Conferences
reliability, more-than-moore, functional diversification