A new theta geometry was developed for micro-scale bending strength measurements. The new gap theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on single-crystal silicon specimens microfabricated using two different etch processes. The resulting gap theta strengths were described by three-parameter Weibull distributions derived from parameters determined from the arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.
Citation: Journal of the Materials Research Society
Pub Type: Journals
Finite element methods, fracture strength, microelectromechanical systems, single-crystal silicon, Weibull statistics