Kirkpatrick, R.
, Osborn, W.
, Gaither, M.
, Gates, R.
, DelRio, F.
and Cook, R.
(2013),
On the bending strength of single-crystal silicon theta-like specimens, Journal of the Materials Research Society
(Accessed April 19, 2024)
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On the bending strength of single-crystal silicon theta-like specimens
Published
Author(s)
, , , , ,
Abstract
A new theta geometry was developed for micro-scale bending strength measurements. The new "gap" theta specimen was a simple modification of the arch theta specimen that enabled micro-scale tensile testing. The gap theta was demonstrated here on single-crystal silicon specimens microfabricated using two different etch processes. The resulting gap theta strengths were described by three-parameter Weibull distributions derived from parameters determined from the arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.Citation
Journal of the Materials Research Society
Pub Type
Journals
Keywords
Finite element methods, fracture strength, microelectromechanical systems, single-crystal silicon, Weibull statistics
Citation
Created July 9, 2013, Updated October 12, 2021