In micro-electro-mechanical systems (MEMS) it is difficult to obtain large range of motion with small coupled error. This limitation was overcome by designing and fabricating a nested structure as a serial kinematic mechanism (SKM). In this paper, a MEMS based XY stage is reported for multi-finger manipulation application. The SKM MEMS XY stage is implemented by embedding a single degree-of-freedom (DOF) stage into another single DOF stage. The proposed MEMS XY stage is fabricated by deep reactive ion etching (DRIE) from both sides of a silicon-on-insulator (SOI) wafer. This SKM MEMS stage has a capability to generate more than 50 μm displacements along each X and Y axis. This nested structure also suppressed the coupling motion error to 0.6% of the original actuation displacement. For the demonstration on the micro-particle manipulation, a 15 μm sized polypropylene particle is manipulated and rotated by operating two individual fingers attached to proposed MEMS stages.
Citation: Journal of Micromechanic and Microengineering
Pub Type: Journals
XY-stage, coordinated manipulation, nested structure, a serial kinematic mechanism