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The Chemisorption of SiCl4, Si2Cl6, and Chlorine on Si(111) 7×7

Published

Author(s)

Lloyd J. Whitman, S Joyce, J Yarmoff, F McFeeley, L Terminello
Citation
Vacuum
Volume
41

Citation

Whitman, L. , Joyce, S. , Yarmoff, J. , McFeeley, F. and Terminello, L. (1990), The Chemisorption of SiCl<sub>4</sub>, Si<sub>2</sub>Cl<sub>6</sub>, and Chlorine on Si(111) 7&#215;7, Vacuum (Accessed March 28, 2024)
Created January 1, 1990, Updated February 19, 2017