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Nanotechnology

Tools and Instruments

Keyword

Organizational Unit

Aberration-Corrected Transmission Electron Microscope (TEM)

Probe corrected 200kV analytic electron microscope Resolves single atoms Chemical analytic capability (EELS, EDS) Highest resolution in electron optics (<0.1 nm

Dual Beam Focused Ion Beam / Scanning Electron Microscope (FIB/SEM)

Dual beam focused ion beam/scanning electron microscope (FESEM). Focused ion beam using Ga atoms allows the patterning of objects at ~10 nm level (milling and

Focused Ion Beam Scanning Electron Microscope (Helios 660)

The Helios 660 NanoLab (HNL660) is a Focused Ion Beam Scanning Electron Microscope equipped with spectroscopic detectors to allow elemental and phase

Hysitron PI-85 Picoindentor

This in-situ indentation system can be integrated into electron microscopes as well as being run in other unusual setups. With a load capacity of 150 mN, this

Photograph of the 4Wave IBD/BTD cluster sputtering system

NanoFab Tool: 4Wave IBD/BTD Cluster Sputter Deposition System

The 4Wave IBD/BTD cluster sputter deposition system can automatically load and unload two six target chambers to provide users a largely unattended 24/7

Photograph of the Allied High Tech Dual Prep PH-3 grinding and polishing system.

NanoFab Tool: Allied High Tech Dual Prep PH-3 Grinding and Polishing System

The Allied High Tech Dual Prep PH-3 grinding and polishing system is used to mechanically thin samples and polish cleaved facets in preparation for high

NanoFab Tool: Asylum Jupiter XR Atomic Force Microscope

The Asylum Jupiter XR atomic force microscope (AFM) is a large-sample AFM with both high speed data acquisition and extended range capabilities able to handle

NanoFab Tool: Bachur & Associates LS-200FSX Photoresist Stabilization System

The Bachur & Associates LS-200FSX Photoresist Stabilization System provides deep-ultraviolet (DUV) flood exposure and resist curing. The system strengthens

NanoFab Tool: Bruker Dektak 6M contact profilometer

The Bruker Dektak 6M contact profilometer measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps

Photograph of the Bruker Dimension FastScan Atomic Force Microscope.

NanoFab Tool: Bruker Dimension FastScan Atomic Force Microscope

The Bruker Dimension FastScan atomic force microscope (AFM) combines a high-speed scanning AFM, programmable stage control, and a user friendly interface to

NanoFab Tool: Denton Vacuum Discovery 550 Sputtering System B104 Right

The Denton Vacuum Discovery 550 sputtering system has two direct current (DC) and two radio frequency (RF) sputtering guns which bombard targets, causing atoms

NanoFab Tool: Denton Vacuum Discovery 550 Sputtering System B104 Left

The Denton Vacuum Discovery 550 sputtering system has two direct current (DC) and two radio frequency (RF) sputtering guns which bombard targets, causing atoms

Photograph of the Denton Vacuum Infinity 22 evaporator.

NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam Evaporator

The Denton Vacuum Infinity 22 electron beam evaporator vapor deposits thin films and is capable of loading up to six source materials for deposition. The

NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam and Thermal Evaporator

The Denton Vacuum Infinity 22 dual source evaporator uses a choice of either electron beam evaporation or resistive heating to vapor deposit thin films

NanoFab Tool: FEI Helios NanoLab 660 Dual Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB) 2

The FEI Helios 660 dual-beam microscope combines a monochromated field emission scanning electron microscope (FE-SEM) with an advanced focused ion beam (FIB)

Photograph of the FEI Titan 80-300 analytical electron microscope.

NanoFab Tool: FEI Titan 80-300 Analytical Transmission Electron Microscope

The FEI Titan 80-300 scanning transmission electron microscope (STEM) is an advanced analytical field emission scanning transmission electron microscope capable

NanoFab Tool: Filmetrics F50 UV Mapping Reflectometer

The Filmetrics F50 is an automated thin-film thickness mapping system equipped with a motorized r-theta stage that moves automatically to selected measurement

NanoFab Tool: First Ten Angstroms FTA125 Contact Angle Goniometer

The First Ten Angstroms FTA125 is a general purpose goniometer that can measure the contact angle and surface tension of liquid droplets on a substrate's

Photograph of the Fischione Model 1040 NanoMill.

NanoFab Tool: Fischione Model 1040 NanoMill Ion Mill

The Fischione Model 1040 NanoMill is a low-energy, low-angle argon ion milling instrument used for preparing ultra-thin, high-quality transmission electron

NanoFab Tool: Four Dimensions 280DI Sheet Resistance Mapping System

The Four Dimensions 280DI sheet resistance mapping system uses the 4-point probe technique to measure the sheet resistance of substrates and films. The

Photograph of the Heidelberg Instruments DWL 2000 Laser Pattern Generator.

NanoFab Tool: Heidelberg Instruments DWL 2000 Laser Pattern Generator

The Heidelberg Instruments DWL 2000 Laser Pattern Generator uses a high resolution laser to expose photoresist for substrate patterning of features as small as

NanoFab Tool: J. A. Woollam M-2000 DI Spectroscopic Ellipsometer

The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range. The high speed CCD

NanoFab Tool: Jeio Tech OF-12G Forced Convection Oven

The Jeio Tech OF-12G forced convection oven is used in the soft lithography processing to perform a dehydration bake prior to silanization and cure samples

NanoFab Tool: Keithley 4200 SCS Parametric Test Station

The Keithley 4200 SCS parametric test system provides in-line electrical characterization capabilities, including the ability to measure capacitance at multiple

Photograph of the Kulicke and Soffa Model 4526 wedge wire bonder.

NanoFab Tool: Kulicke and Soffa Model 4526 Wedge Wire Bonder

The Kulicke and Soffa Model 4526 wedge wire bonder provides electrical interconnects between a device chip and package using thin aluminum or gold wires. The