Tools & Instruments

NanoFab Tool: Veeco Dimension 3100 Atomic Force Microscope

The Veeco Dimension 3100 atomic force microscope (AFM) provides users the ability to characterize the surface roughness of nanofabricated structures. Conveniently located outside of the cleanroom, it can perform nanomanipulation and nanolithography on substrates ranging from 200 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Contact mode, tapping mode, and phase imaging.
  • Electrostatic force microscopy.
  • Magnetic force microscopy.
  • Nanomanipulation and nanolithography.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Maximum substrate thickness: 12 mm.
  • Small pieces supported: Yes.

Typical Applications

  • Characterization of surface roughness.
  • Pattern characterization for lithography structures, magnetic media, CD/DVDs.
  • Structure characterization of polymers, biomaterials and other samples.
  • Nanomanipulation and nanolithography by using AFM tip.
Nanotechnology and Nanofabrication / manufacturing

Organizations

Details

NEMO Name:
Veeco AFM
Location:
Building 215 Rm. G107
Campus:
Gaithersburg

Hours of Operation

Cleanroom hours

Tool Reservation Rules

  • Minimum Reservation Time: 30 minutes.
  • Maximum Reservation Time: 8 hours.
  • Adjacent Reservations Permitted: Yes.
  • Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

Hourly Rate

Standard Cost:
$122
Reduced Cost:
$65

Training Rates

Individual Cost:
$220
Group Cost:
$110

Training Time

Depends on user experience and process requirements; typically 2 hours.

Contact

Created May 19, 2014, Updated April 28, 2017