Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

NanoFab Tool: Nanometrics Nanospec Reflectometer

Photograph of the Nanometrics Nanospec reflectometer.

The Nanometrics Nanospec reflectometer provides users with a quick film thickness measurement on the most common device film stacks. The Nanospec combines a simple microscope with a reflectance measurement system, allowing point specific film thickness determination on substrates ranging from 150 mm diameter wafers down to small pieces.


  • Film thicknesses from several micrometers down to 10 nm.
  • Standard Films:
    • Oxide on silicon.
    • Nitride on silicon.
    • Polysilicon on oxide on silicon.
    • Photoresist on silicon.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 10 mm.

Typical Applications

  • Thickness verification of deposited or etched films.
  • Process characterization of patterned substrates.
Created May 21, 2014, Updated November 25, 2019