To report a problem, first locate the tool that you would like to report a problem on. For this example, we will report a problem on the Wet Etch 1 Tool. First access the Tool control screen. From the Tool control screen, you can either click on the Wet Chemistry tool category tree to list the tools under that category to locate the Wet Etch 1 or type in the tool name in the “Search for a tool” to locate the tool. See figures 33 and 34 for examples of each.
Click on Report a problem. The problem report information text box will allow you to report a problem for the Wet Etch 1. Make sure that you provide a detailed description of the problem in the text box so NanoFab staff can address the problem accordingly. See Figure 35 below.
You can choose a problem category that best describes the problem if appropriate. See Figure 36 below.
The problem report information box includes check boxes allowing you to either flag this tool problem as a Safety Hazard or Tool Shutdown or both if applicable to the problem report. Once you complete entering in all the appropriate information for the report click on Report problem. See Figure 37 below.
Your tool problem report has been logged and the appropriate NanoFab staff has been alerted about the tool problem. If you make a mistake in reporting a tool problem, you can cancel the tool problem. Click on the wrench icon then click on cancel. See Figure 38 below. Doing this will delete the tool problem report for the tool and confirm that it is deleted. See Figure 39 below.