TY  - JOUR
AU  - Hui Zhou
AU  - Joseph Fu
AU  - Richard Silver
C2  - Journal of Physical Chemistry
DA  - 2007-01-01
LA  - en
M1  - 111
PB  - Journal of Physical Chemistry
PY  - 2007
TI  - A Time-Resolved Kinetic Monte-Carlo Simulation Study On Si (111) Etching
ER  -