TY  - CONF
AU  - Michael Postek
C2  - Proceedings of SPIE , Gaithersburg, MD
DA  - 2002-07-01
LA  - en
M1  - 4608
PB  - Proceedings of SPIE , Gaithersburg, MD
PY  - 2002
TI  - The Challenge of Nanometrology
ER  -