TY - JOUR AU - John Villarrubia AU - Andras Vladar AU - Michael Postek C2 - Journal of Microlithography Microfabrication and Microsystems DA - 2005-07-01 LA - en M1 - 4 PB - Journal of Microlithography Microfabrication and Microsystems PY - 2005 TI - A Simulation Study of Repeatability and Bias in the CD-SEM UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822536 ER -