TY - CONF AU - Michael Postek AU - John Villarrubia AU - Andras Vladar C2 - Proceedings of SPIE, Santa Clara, CA DA - 2003-05-01 LA - en M1 - 5038 PB - Proceedings of SPIE, Santa Clara, CA PY - 2003 TI - New Way of Handling Dimensional Measurement Results for Integrated Circuit Technology ER -