TY  - JOUR
AU  - Egon Marx
AU  - I Malik
AU  - T Bristow
AU  - N Poduje
AU  - J Stover
AU  - Y Strausser
AU  - M Weber
C2  - Journal of Vacuum Science and Technology
DA  - 2002-01-01
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology
PY  - 2002
TI  - Power Spectral Densities: A Multiple Technique Study of Different Si Wafer Surfaces
ER  -