TY  - CONF
AU  - Ronald Dixson
AU  - V Tsai
AU  - Theodore Vorburger
AU  - Edwin Williams
AU  - X Wang
AU  - Joseph Fu
AU  - R Koning
C2  - Proceedings of American Society for Precision Engineering, Unknown, USA
DA  - 1998-01-01
LA  - en
PB  - Proceedings of American Society for Precision Engineering, Unknown, USA
PY  - 1998
TI  - Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated Atomic Force Microscope
ER  -