TY - JOUR AU - Michael Postek AU - Andras Vladar AU - Marylyn Bennett AU - T Rice AU - R Knowles C2 - Journal of Microlithography Microfabrication and Microsystems DA - 2004-04-01 LA - en M1 - 3 PB - Journal of Microlithography Microfabrication and Microsystems PY - 2004 TI - Photomask Dimensional Metrology in the SEM Part II: High-Pressure/Environmental Scanning Electron Microscope ER -