TY  - VIDEO
AU  - Andras Vladar
AU  - Michael Postek
C2  - NIST/SEMATECH Collaboration LITG 410I Project Final Report
DA  - 2000-11-15
LA  - en
PB  - NIST/SEMATECH Collaboration LITG 410I Project Final Report
PY  - 2000
TI  - NIST/SEMATECH Collaboration: Application of Nano-Tips to Production CD-SEMs
ER  -