TY  - CONF
AU  - Egon Marx
AU  - James Potzick
C2  - Proceedings of 2005 Digest of the IEEE Antennas and Propagation Society International Symposium, Unknown, USA
DA  - 2005-01-01
LA  - en
PB  - Proceedings of 2005 Digest of the IEEE Antennas and Propagation Society International Symposium, Unknown, USA
PY  - 2005
TI  - Simulation of Optical Microscope Images for Photomask Feature Size Measurements
ER  -