TY  - CONF
AU  - Ronald Dixson
AU  - Ndubuisi Orji
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2007-04-05
LA  - en
M1  - 6517
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2007
TI  - Comparison and Uncertainties of Standards for CD-AFM Microscope Tip Width Calibration
ER  -