TY  - JOUR
AU  - Michael Postek
AU  - John Villarrubia
AU  - Andras Vladar
C2  - Journal of Vacuum Science and Technology B
DA  - 2005-11-01
LA  - en
M1  - 23
PB  - Journal of Vacuum Science and Technology B
PY  - 2005
TI  - Advanced Metrology Needs for Nanotechnology and Nanomanufacturing
ER  -