TY  - CONF
AU  - Ronald Dixson
AU  - Michael Cresswell
AU  - Richard Allen
AU  - William Guthrie
AU  - Brandon Park
AU  - Christine Murabito
AU  - Joaquin Martinez
C2  - SEMATECH Internal Report, Unknown, TX
DA  - 2004-01-01
LA  - en
PB  - SEMATECH Internal Report, Unknown, TX
PY  - 2004
TI  - Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM)
ER  -