TY - CONF AU - Hui Zhou AU - Bradley Damazo AU - S Gonda AU - Richard Silver C2 - Proceedings American Society for Precision Engineering, Orlando, FL DA - 2003-10-01 LA - en PB - Proceedings American Society for Precision Engineering, Orlando, FL PY - 2003 TI - Developing Atomic-Resolution Measurements Using a Tunable Diode Laser-Based Interferometer ER -