TY  - CONF
AU  - Richard Silver
AU  - Ravikiran Attota
AU  - Egon Marx
C2  - Proceedings of SPIE, Munich, GE
DA  - 2007-06-18
LA  - en
M1  - 6617
PB  - Proceedings of SPIE, Munich, GE
PY  - 2007
TI  - Model-Based Analysis of the Limits of Optical Metrology With Experimental Comparisons
ER  -