TY  - CONF
AU  - Michael Postek
AU  - Kevin Lyons
C2  - Proceedings of SPIE, San Diego, CA
DA  - 2007-09-01
LA  - en
M1  - 6648
PB  - Proceedings of SPIE, San Diego, CA
PY  - 2007
TI  - Instrumentation, Metrology, and Standards: Key Elements for the Future of Nanomanufacturing
ER  -