TY  - GEN
AU  - James Potzick
C2  - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1997-01-01
LA  - en
PB  - Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1997
TI  - Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring System
ER  -