TY  - GEN
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Shape-Sensitive Linewidth Measurements of Resist Structures
ER  -