TY  - CONF
AU  - Ndubuisi Orji
AU  - Angela Martinez
AU  - Ronald Dixson
AU  - J Allgair
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2006-03-01
LA  - en
M1  - 6152
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2006
TI  - Progress on Implementation of a CD-AFM Based Reference Measurement System
ER  -