TY  - JOUR
AU  - Yifu Ding
AU  - Hyun
AU  - Jack Douglas
AU  - Ronald Jones
AU  - Daniel Hines
AU  - Alamgir Karim
AU  - Christopher Soles
C2  - Advanced Materials
DA  - 2007-05-24
LA  - en
M1  - 19
PB  - Advanced Materials
PY  - 2007
TI  - Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852665
ER  -