TY  - CONF
AU  - Vivek Prabhu
AU  - B Vogt
AU  - Wen-Li Wu
AU  - Jack Douglas
AU  - Sushil Satija
AU  - D Goldfarb
AU  - H Ito
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2005-03-01
LA  - en
M1  - 5753
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2005
TI  - Interfacial Structure of Photoresist Thin Films in Developer Solutions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852460
ER  -