TY  - CONF
AU  - Colm Flannery
AU  - Donna Hurley
C2  - Review of Progress in Quantitative Nondestructive Evaluation | | Review of Progress in Quantitative Nondestructive Evaluation, Volume 22 | AIP
DA  - 2003-03-01
LA  - en
M1  - 657
PB  - Review of Progress in Quantitative Nondestructive Evaluation | | Review of Progress in Quantitative Nondestructive Evaluation, Volume 22 | AIP
PY  - 2003
TI  - Laser Ultrasound: An Inspection Tool of Soft Porous Low-Dielectric Constant Films for Microelectronic Interconnect
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851310
ER  -