TY - JOUR AU - Chad Snyder AU - F Mopsik C2 - Review of Scientific Instruments DA - 1998-11-01 LA - en M1 - 69 PB - Review of Scientific Instruments PY - 1998 TI - A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion I Thermal Expansion UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851453 ER -