TY  - JOUR
AU  - Yifu Ding
AU  - Hyun
AU  - Thomas Germer
AU  - Jack Douglas
AU  - Brian Okerberg
AU  - Alamgir Karim
AU  - Christopher Soles
C2  - ACS Nano
DA  - 2007-08-14
LA  - en
M1  - 1
PB  - ACS Nano
PY  - 2007
TI  - Relaxation Behavior of Polymer Structures Fabricated by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852744
ER  -