TY  - JOUR
AU  - Donna Hurley
AU  - Roy Geiss
AU  - N Jennett
AU  - Malgorzata Kopycinska-Mueller
AU  - A Maxwell
AU  - Jens Mueller
AU  - David Read
AU  - J Wright
C2  - Journal of Materials Research
DA  - 2005-05-31
LA  - en
M1  - 20
PB  - Journal of Materials Research
PY  - 2005
TI  - Acoustical methods to determine thin-film and nanoscale mechanical properties
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50075
ER  -