TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Yiping Liu
C2  - Applied Physics Letters
DA  - 2007-10-25
LA  - en
M1  - 91
PB  - Applied Physics Letters
PY  - 2007
TI  - Non Uniform Structural Degradation in Porous Organosilicate Films Exposed to Plasma, Etching and Ashing as Characterized by X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852742
ER  -