TY  - SER
AU  - Ronald Jones
AU  - Vivek Prabhu
AU  - D Goldfarb
AU  - Eric Lin
AU  - Christopher Soles
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Wen-Li Wu
AU  - M Angelopoulos
C2  - American Chemical Society, Washington DC, DC
DA  - 2004-07-01
LA  - en
M1  - 874
PB  - American Chemical Society, Washington DC, DC
PY  - 2004
TI  - Correlation of the Reaction Front With Roughness in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852147
ER  -