TY  - JOUR
AU  - Vivek Prabhu
AU  - S Sambasivan
AU  - Daniel Fischer
AU  - Linda Sundberg
AU  - Robert Allen
C2  - Applied Surface Science
DA  - 2006-05-09
LA  - en
M1  - 253
PB  - Applied Surface Science
PY  - 2006
TI  - Quantitative Depth Profiling of Photoacid Generators in Photoresist Materials by Near-Edge X-Ray Absorption Fine Structure Spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852582
ER  -