TY  - JOUR
AU  - Kao-Shuo Chang
AU  - Martin Green
AU  - John Suehle
AU  - Eric Vogel
AU  - Hao Xiong
AU  - Jason Hattrick-Simpers
AU  - Ichiro Takeuchi
AU  - O Famodu
AU  - K Ohnaka
AU  - T Chikyow
AU  - Prashant Majhi
AU  - B Lee
AU  - M Gardner
C2  - Applied Physics Letters
DA  - 2006-10-02
LA  - en
M1  - 89
PB  - Applied Physics Letters
PY  - 2006
TI  - Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO<sub>2</sub> for the Advanced Gate Stack
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850953
ER  -