TY  - JOUR
AU  - Hyun
AU  - Yifu Ding
AU  - Hae-Jeong Lee
AU  - Daniel Hines
AU  - Ronald Jones
AU  - Eric Lin
AU  - Alamgir Karim
AU  - Wen-Li Wu
AU  - Christopher Soles
C2  - Journal of Vacuum Science and Technology B
DA  - 2006-11-30
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology B
PY  - 2006
TI  - Evidence for Internal Stresses Induced by Nanoimprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852638
ER  -