TY - JOUR AU - Donna Hurley AU - K Shen AU - N Jennett AU - J Turner C2 - Journal of Applied Physics DA - 2003-08-01 LA - en M1 - 94 PB - Journal of Applied Physics PY - 2003 TI - Atomic Force Acoustic Microscopy Methods to Determine Thin-Film Elastic Properties UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851331 ER -