TY  - JOUR
AU  - Dylan Morris
AU  - Robert Cook
C2  - Journal of Materials Research
DA  - 2008-09-12
LA  - en
M1  - 23
PB  - Journal of Materials Research
PY  - 2008
TI  - Indentation Fracture of Low Dielectric Constant Films, Part II. Indentation Fracture Mechanics Model
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851100
ER  -