TY  - CONF
AU  - Ronald Jones
AU  - C Willson
AU  - T Hu
AU  - Vivek Prabhu
AU  - Christopher Soles
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
AU  - B Trinque
C2  - Proceedings of SPIE, Santa Clara, CA
DA  - 2003-06-01
LA  - en
M1  - 5039
PB  - Proceedings of SPIE, Santa Clara, CA
PY  - 2003
TI  - Deprotection Volume Characteristics and Line Edge Morphology in Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852190
ER  -